SH-110

SH-110

Share:


SH-110

The Agilent SH-110 is a dry, hermetic scroll pump with industry-leading features designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump has a pumping speed of 110 liters/minute (on 60 Hz power) and an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is ideal for many end-user applications.

The SH-110 pump conforms to European Union directives (CE), Canadian Standards Authority (CSA), and Semi S2-0200 requirements.

  • Low-temperature operation
  • ¼-horsepower motor for low power consumption
  • Built-in exhaust valve for low noise levels
  • Moveable exhaust port for flexibility in tight spaces
  • High pumping speed (110 liters/minute) at high pressure for fast pumpdown
  • Lightweight; convenient carrying handle
  • Built-in fail-safe isolation valve protects the vacuum system
  • Universal 100-230 VAC power for easy installation worldwide
Technical Specifications

Peak pumping speed (60 Hz) 110 L/m, 6.6 m³/hr, 4.0 cfm
Peak pumping speed (50 Hz) 90 L/m, 5.4 m³/hr, 3.3 cfm
Ultimate pressure 5.0 × 10-2 torr (6.6 × 10-2 mbar)
Maximum inlet pressure 1 atmosphere (0 psig)
Maximum outlet pressure 1.5 atmosphere (7.5 psig)
Inlet connection NW25 KF flange
Exhaust connection 1⁄4-in. female nat’l pipe thread
Exhaust connection adapter NW16 KF adapter provided
Gas ballast connection 1⁄8-in. female nat’l pipe thread
Ambient operating temperature 5 to 40 °C (41 to 104 °F)
Storage temperature –20 to 60 °C (–4 to 140 °F)
Motor rating 0.25 horsepower (0.19 kW)
Supply power 1 phase, 50-60 Hz,
100-115/200-230 VAC
Motor thermal protection Automatic
Rotation speed 1725 RPM at 60 Hz
1425 RPM at 50 Hz
Cooling Air-cooled
Weight 19.5 kg (43 lbs)
Restrictions No corrosive, explosive, or particulate-forming gases
Leak rate (exhaust sealed) <1 × 10-7 std-cc/sec helium
Compliances Conforms with CE, CSA, and Semi S2-2000

Pumping Speed Graph
SH-110 Dry Scroll Pump Outline Drawing

Outline Drawing
SH-110 Dry Scroll Pump Outline Drawing
Description
SH-110 single-scroll pump SH01101UNIV
Tip seal replacement kit SH0110TS
Exhaust silencer kit SH0110EXSLR
Power Cord Selection
Europe, 10 A, 220-230 VAC, 2.5 meter 656494220
Denmark, 10 A, 220-230 VAC, 2.5 meter 656494225
Switzerland, 10 A, 230 VAC, 2.5 meter 656494235
UK/Ireland, 13 A, 230 VAC, 2.5 meter 656494250
India, 10 A, 220-250 VAC, 2.5 meter 656494245
Israel, 10 A, 230 VAC, 2.5 meter 656494230
Japan, 12 A, 100 VAC, 2.3 meter 656494240
North America, 15 A, 125 VAC, 2.0 meter 656458203
North America, 10 A, 230 VAC, 2.5 meter 656494255